“School of Particles”
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| Paper IPM / Particles / 15634 |
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Argon plasma behavior in a 2.45GHz electron cyclotron resonance (ECR) plasma source is studied by means of the finite element software COMSOL. The ECR plasma is simulated in two stages. First, the static magnetic field, produced by three solenoids and a set of Halbach permanent magnets, is simulated in a stationary study. This field is then used to simulate the properties of an on-resonance microwave plasma. Our first results including magnetic field distribution, electron density, Argon ion density and microwave power absorption are presented.
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