• 1
  • 2
  • 5
  • 6
  • 3
  • 4
IPM
30
YEARS OLD

“School of Particles And Accelerator”

Back to Papers Home
Back to Papers of School of Particles And Accelerator

Paper   IPM / Particles And Accelerator / 15634
School of Particles and Accelerator
  Title:   COMSOL simulation of a 2.45GHz electron cyclotron resonance argon plasma
  Author(s): 
1.  Mostafa Salahshoor
2.  Morteza Aslaninejad
  Status:   In Proceedings
  Proceeding: AIP Conference Proceedings 2011, 040024 (2018)
  Year:  2018
  Supported by:  IPM
  Abstract:
Argon plasma behavior in a 2.45GHz electron cyclotron resonance (ECR) plasma source is studied by means of the finite element software COMSOL. The ECR plasma is simulated in two stages. First, the static magnetic field, produced by three solenoids and a set of Halbach permanent magnets, is simulated in a stationary study. This field is then used to simulate the properties of an on-resonance microwave plasma. Our first results including magnetic field distribution, electron density, Argon ion density and microwave power absorption are presented.

Download TeX format
back to top
Clients Logo
Clients Logo
Clients Logo
Clients Logo
Clients Logo
Clients Logo
Clients Logo
Clients Logo
scroll left or right